Sven Achenbach

Biography

Sven Achenbach studied Mechanical Engineering at the University of Karlsruhe, Germany. Since 1996, he has worked at the national laboratory LURE in Paris and the German national laboratory Forschungszentrum Karlsruhe (FZK), optimizing microfabrication process technologies. He received his Ph.D. on ultra deep X-ray lithography in 2000. His research focuses on various aspects of X-ray lithography process technology and on selected applications areas (including RF MEMS and micro/nano fluidics). The research is carried out at various electron storage rings worldwide, in cooperation with several laboratories, universities and companies in Europe, America and Asia. From 2005-2016, Sven Achenbach assumed the Canada Research Chair in Micro and Nano Device Fabrication at the University of Saskatchewan, Saskatoon, Canada. He is a Professor of Electrical Engineering, Principal Investigator and Beam Team Leader at SyLMAND, Canada's first X-ray lithography laboratory, and an Adjunct Scientist of Telecommunication Research Labs of Canada (TRLabs) at Innovation Place, Saskatoon. The main focus of current activities is finishing capital construction and scientific commissioning of SyLMAND, the Synchrotron Laboratory for Micro and Nano Devices, at the Canadian Light Source (CLS). SyLMAND is a unique, multi million $ facility in Canada, comprising a dedicated synchrotron beamline and several wet chemical, metrology and preparation labs in a clean room environment. Recent applications of research projects include high performance active and passive RF MEMS devices, biomedical detectors and microdfluidic test patterns as well as optical components such as IR bandpass filters

Research Interest

His research focuses on various aspects of X-ray lithography process technology and on selected applications areas (including RF MEMS and micro/nano fluidics).