Han Li
Professor
Institute of Electrical Engineering
Chinese Academy of Sciences
China
Biography
2003.08-now Director of Electron-beam lithography division, institute of electrical engineering, Chinese Academy of Sciences, P.R. China 2003.4-2003.7 Researcher, Electron-beam lithography division, institute of electrical engineering, Chinese Academy of Sciences, P.R. China 2002.7-2003.4 Assistant researcher, Micro-mechanical and Micro-electrical division, institute of electrical engineering, Chinese Academy of Sciences, P.R. China 2000.5-2002.6 Post-doctor, Department of Engineering Mechanics, Tsinghua University, Beijing, China 1995.9-1999.12 Department of physics, Tsinghua University, Beijing, China 1992.9-1995.5 Department of Physics, Lanzhou University, P.R. China Education: 1995.09-1999.12 PhD course, Department of Physics, Tsinghua University, Beijing, P.R. China 1992.09-1995.06 Master course, Department of Physics, Lanzhou University, P.R. China 1988.09-1992.06 undergraduate course, Department of Physics, Lanzhou University, P.R. China
Research Interest
Electron-beam lithography
