Pengyun Jin
Institute of Electrical Engineering
Chinese Academy of Sciences
China
Biography
Dr. Pengyun Jin is currently working as a Professor in the Department of Institute of Electrical Engineering, Chinese Academy of Sciences , China. Dr. Pengyun Jin is currently working as a Professor in the Department of Institute of Electrical Engineering, Chinese Academy of Sciences , China.
Research Interest
Research Directions: The key technologies in microelectronic equipment— Electron-beam lithographic technology and and Nano pattern generators system.
