Yin Bohua
Institute of Electrical Engineering
Chinese Academy of Sciences
China
Biography
Education and Work Experiences: Bachelor: 1992.8-1996.7 Nanjing University of Aeronautics and Astronautics, College of Mechanical and Electrical Engineering 1996.8-1999.10 China Precision Engineering Institute for Aircraft Industry. Focus in ultra precision engineering R&D. Master: 2000.8-2003.7 Institute of Laser Engineering, Beijing University of Technology, 2003.8- : Institute of Electrical Engineering, Electron Beam Lithographic Technology. I interested in researching on E-beam lithography system and fast scan AFM system.Education and Work Experiences: Bachelor: 1992.8-1996.7 Nanjing University of Aeronautics and Astronautics, College of Mechanical and Electrical Engineering 1996.8-1999.10 China Precision Engineering Institute for Aircraft Industry. Focus in ultra precision engineering R&D. Master: 2000.8-2003.7 Institute of Laser Engineering, Beijing University of Technology, 2003.8- : Institute of Electrical Engineering, Electron Beam Lithographic Technology. I interested in researching on E-beam lithography system and fast scan AFM system.
Research Interest
Research Directions: E-beam lithography system R&D and relative control system technology
Publications
-
Stage Control System in the E-Beam Lithography System; Modular Machine Tool & Automatic Manufacturing Technique, Vol. 2005.2
