Yin Bohua
Professor
Institute of Electrical Engineering
Chinese Academy of Sciences
China
Biography
Bachelor: 1992.8-1996.7 Nanjing University of Aeronautics and Astronautics, College of Mechanical and Electrical Engineering 1996.8-1999.10 China Precision Engineering Institute for Aircraft Industry. Focus in ultra precision engineering R&D. Master: 2000.8-2003.7 Institute of Laser Engineering, Beijing University of Technology, 2003.8- : Institute of Electrical Engineering, Electron Beam Lithographic Technology. I interested in researching on E-beam lithography system and fast scan AFM system.
Research Interest
E-beam lithography system R&D and relative control system technology
Publications
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3: Real-Time Display System Design for E-beam Lithography Process; Industrial Control Computer, Vol.2004.08
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2: E-beam lithography position error correction system base on CPLD and high precision DA modules. 2005 13th National Conference on Electron, Ion, and Photon Beam Proceedings
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1: Stage Control System in the E-Beam Lithography System; Modular Machine Tool & Automatic Manufacturing Technique, Vol. 2005.2
