Gan Zhiyin
professor
Mechanical Science and Engineering
Huazhong University of Science and Technology
China
Biography
Dr. Zhiyin Gan received B.S. degree from Nankai University in 1987, M.S. degree from Beijing Polytech University in 1990, and Ph.D. degree from Huazhong University of Science and Technology (HUST), Wuhan, China, in 2008. From 1991 to 2002, he was engaged in research in the field of optoelectronics in Beijing, Shenzhen, and Wuhan. From 2003 he served as an associate professor at both School of Mechanical Science and Engineering and Wuhan National Laboratory for Optoelectronics (WNLO) and has been a Professor at HUST ever since 2010. His main research interests include computational physics, MEMS/NEMS System design and simulation, opto-electronic and RF devices, MEMS fabrication processes and equipment, semiconductor process equipment design and manufacture. He has served as PI in both national and regional MOCVD equipment projects, and developed Chinese made but innovative MOCVD equipment which has successfully entered industrial stage and ready for volume application.
Research Interest
(1)MEMS/NEMS System design and simulation; (2)Semiconductor process research and equipment design.
Publications
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3.Hui Cao, Zhiyin Gan, Qiang Lv, Han Yan, Xiaobin Luo, Xiaohui Song and Sheng Liu. “Single-walled carbon nanotube network/poly composite thin film for flow sensorâ€, Microsystem Technologies, 16(6), 2010: 955 ~ 959.
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2.Tingkai Zhang, Honghai Zhang, Jian Xu, Sheng Liu, Zhiyin Gan. “Study on triple-stack anodic bonding using two electrodesâ€, Sensors and Actuators A: Physical, 157(1), 2010: 168 ~ 172.
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1.Zhiyin Gan, Dexiu Huang, Xuefang Wang, Dong Lin, Sheng Liu. “Getter free vacuum packaging for MEMSâ€, Sensors and Actuators A: Physical, 149(1), 2009: 159 ~ 164.
