Dirch Hjorth Petersen
Senior Scientist
Micro and nano technology
ASM
Denmark
Biography
2013†Present Senior Researcher at DTU Nanotech 2012â€2013 Researcher at DTU Nanotech 2009â€2012 Postdoc at DTU Nanotech 2002â€2010 Capres A/S: Consultant (3 years), R&D Engineer (1 year) and student job (5 years)
Research Interest
I have 13 years of experience in development of electrical measurement techniques, including design of MEMS, development of MEMS fabrication techniques, chipâ€packaging, data analysis models, and data correction algorithms. Four of my patents within metrology are today used worldwide in the semiconductor industry by leading companies and research institutions. Today I am part of the Nanocarbon group at DTU Nanotech and work on the project "Advanced Conductance Mapping : Multiâ€Metrology" funded by the Villum foundation. The project is focused on development of optical and probe based methods for electrical characterization of graphene.