Patrick Schiavone
optical metrology and lithography
ASELTA Nanographics
France
Biography
Before joining ASELTA, Patrick was a Senior Research Scientist at the Georgia Tech – CNRS joint lab in Atlanta. He cumulates more than 20 years in leading R&D Laboratories in Microelectronics working in the field of optical metrology and lithography. He authored or co-authored more than 140 publications in conferences and refereed journals and holds 8 patents. Dr Schiavone holds a PhD in Physics from Université Paris 6.
Research Interest
optical metrology,Microelectronics
