Mark-alexander Henn
Researcher
Dept of mathematical Modelling and simulation
Physikalisch-Technische Bundesanstalt
Germany
Biography
Dr. Mark-Alexander Henn is affiliated to Dept of mathematical Modelling and simulation, Physikalisch-Technische Bundesanstalt, where Dr. Mark-Alexander Henn is currently working as Researcher. Dr. Mark-Alexander Henn has authored and co-authored several national and international publications and also working as a reviewer for reputed professional journals. Dr. Mark-Alexander Henn is having an active association with different societies and academies around the world. Dr. Mark-Alexander Henn made his mark in the scientific community with the contributions and widely recognition from honourable subject experts around the world. Dr. Mark-Alexander Henn has received several awards for the contributions to the scientific community. Dr. Mark-Alexander Henn major research interest involves Developed an alternative approach to the inverse problem of scatterometry based on maximum likelihood estimation. Investigated the influence of systematic errors, e.g. line roughness on scatterometry. Proposed a new approach to a treatment of the inverse problem in a Bayesian framework. .
Research Interest
Developed an alternative approach to the inverse problem of scatterometry based on maximum likelihood estimation. Investigated the influence of systematic errors, e.g. line roughness on scatterometry. Proposed a new approach to a treatment of the inverse problem in a Bayesian framework.
Publications
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Henn MA, Gross H, Scholze F, Wurm M, Elster C (2012) A maximum likelihood approach to the inverse problem of scatterometry. Opt Express 20:12771-12786.