Matthias Wurm
Researcher
Dept of optical nanometrology
Physikalisch-Technische Bundesanstalt
Germany
Biography
Dr. Matthias Wurm is affiliated to Dept of optical nanometrology, Physikalisch-Technische Bundesanstalt, where Dr. Matthias Wurm is currently working as Researcher. Dr. Matthias Wurm has authored and co-authored several national and international publications and also working as a reviewer for reputed professional journals. Dr. Matthias Wurm is having an active association with different societies and academies around the world. Dr. Matthias Wurm made his mark in the scientific community with the contributions and widely recognition from honourable subject experts around the world. Dr. Matthias Wurm has received several awards for the contributions to the scientific community. Dr. Matthias Wurm major research interest involves Scatterometry, ellipsometry, Mueller polarimetry, sub-wavelength-metrology, modelling and simulations.
Research Interest
Scatterometry, ellipsometry, Mueller polarimetry, sub-wavelength-metrology, modelling and simulations
Publications
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Wurm M, Pilarski F, Bodermann B (2010) A new flexible scatterometer for critical dimension metrology. Rev Sci Instrum 81:023701.