L.l. Rajeswara Rao
Assistant Professor
Electronics and Instrumentation Engineering
GITAM University
India
Biography
Assistant Professor, Department of Electronics and Instrumentation Engineering, Gitam Institute of Technology, GITAM University, Visakhapatnam.
Research Interest
Instrument Technology
Publications
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Inductively coupled reactive ion etching studies on sputtered Yttria stabilized Zirconia thin films in SF6, Cl2, and BCl3 chemistries. Journal of Vacuum Science & Technology B, 33, 2015.
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Investigation of Annealing Induced Yttria Segregation in Sputtered Yttria-Stabilized Zirconia Thin Films. Journal of the American Ceramic Society, 98, 2015.
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Molybdenum microheaters for MEMS based gas sensor applications: Fabrication, Electro-thermo-mechanical and Response Characterization. IEEE SENSORS JOURNAL, 17, 2017.