Pradeep Dixit
Professor
Mechanical Engineering
Indian Institute of Technology Bombay
India
Biography
Ph.D., Nanyang Technological University, Singapore, 2008 M.Tech., Indian Institute of Technology Bombay, 2003 B.Tech., Madan Mohan Malviya University of Technology, 2001
Research Interest
MEMS, Microfabrication, Microsystems Packaging, 3D Interconnections, Non-conventional Machining
Publications
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Dixit, P., Vehmas, T., Vähänen, S., Monnoyer, P., Henttinen, K, "Fabrication and electrical characterization of high aspect ratio poly-silicon filled through-silicon vias", Journal of Micromechanics and Microengineering , Vol. 22, Page: 055021
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Dixit, P., Vähänen, S., Salonen, J., Monnoyer, P., "Effect of process gases on fabricating tapered through-silicon vias by continuous SF6/O2/Ar plasma etching", ECS Journal of Solid State Science and Technology, Vol. 1, Page: P107
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Lin, N., Miao, J., Dixit, P., "Void formation over limiting current density and impurity analysis of TSV fabricated by constant-current pulse-reverse modulation" Microelectronics Reliability, Vol. 53, Page: 1943
