Prem Pal
Associate Professor
Department of Physics
Indian Institute of Technology Hyderabad
India
Biography
Dr. Prem Pal is an Associate Professor in the Department of Physics at Indian Institute of Technology Hyderabad
Research Interest
MEMS/Microelectronics technology Silicon Micromachining Anodic Oxidation IR Detector MEMS-based Bio/Chemical Sensors Inertial sensors Thin films for MEMS
Publications
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Sajal Sagar Singh, Prem Pal and Ashok Kumar Pandey, "Mass sensitivity of non-uniform microcantilever beam," ASME Journal of Vibration and Acoustics, 2016
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Sajal Sagar Singh, Prem Pal, Ashok Pandey, Yan Xing and Kazuo Sato, "Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMS: A Review", Micro and Nano Systems Letters, 4(5), 2016
