Habuka Hitoshi
Professor
Materials Science and Chemical Engineering
Yokohama National University
Japan
Biography
Professor, Yokohama National University , 2002/04 - Ongoing Associate Professor, Yokohama National University , 2000/04 - 2002/03 Shin-Etsu Chemical Co., Ltd. Isobe R&D Center , 1986/04 - 2000/03
Research Interest
Applied materials, Reaction engineering/Process system
Publications
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Repetition of In Situ Cleaning Using Chlorine Trifluoride Gas for Silicon Carbide Epitaxial Reactor (Kosuke Mizuno, Kohei Shioda, Hitoshi Habuka, Yuuki Ishida and Toshiyuki Ohno) ECS Journal of Solid State Science and Technology vol.5 (2) (p.P12-P15) 2016
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A Method to Adjust Polycrystalline Silicon Carbide Etching Rate Profile by Chlorine Trifluoride Gas (Ken Nakagomi, Shogo Okuyama, Hitoshi Habuka, Yoshinao Takahashi and Tomohisa Kato) Materials Science Forum vol.897 (p. 383-386) 2017
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Susceptor Coating Materials Applicable for SiC Reactor Cleaning (Kohei Shioda, Hitoshi Habuka, Hideki Ito, Shin-ichi Mitani and Yoshinao Takahashi) Materials Science Forum vol.897 (p.99-102) 2017
