Habuka Hitoshi

Biography

School Attended (except graduate school) Niigata University , Faculty of Science , Department of chemistry 1979 , Graduated Graduate School Attended, etc. Kyoto University , Graduate School, Division of Natural Science , Department of chemistry Master Course , 1981 , Completed Hiroshima University , Graduate School, Division of Engineering , Department of chemical engineering Doctor Course , 1996 , Completed Research Career Professor, Yokohama National University , 2002/04 - Ongoing Associate Professor, Yokohama National University , 2000/04 - 2002/03 Shin-Etsu Chemical Co., Ltd. Isobe R&D Center , 1986/04 - 2000/03 Career Research Semicondutor crystal production process and instrument(Si, InP, GaAsP, SiC) Crystal growth Thin film formation Cleaning Heat  Surface phenomena(contamination, surface reaction)  Transport phenomena and chemical reaction for semiconductor crystal production

Research Interest

Research Field (grants-in-aid-for-scientific-research classification) Applied materials Reaction engineering/Process system Current Subject Silicon epitaxial thin film growth crystal growth,Silicon,Surface Chemical processes on silicon surface Silicon,surface,Chemical reaction Heat quipment using radiation (Infrared, etc) Heat Adsorption and contamination of various molecules contamination , adsorption Analysis and development of cleaning equipment cleaning , quipment