Chung, Chee Won
Professor
Chemical Engineering
Inha University
Korea
Biography
Professor, Chemical Engineering, Inha University
Research Interest
Etching and deposition of electronic materials
Publications
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Etch characteristics of Ru thin films using O-2/Ar, CH4/Ar, and O-2/CH4/Ar plasmas , THIN SOLID FILMS , Vol.615 , pp311~317 , 2016
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Influence of Selenization Pressure on Properties of CIGS Absorber Layer Prepared by RF Sputtering , Current photovoltaic Research , Vol.4 No.3 , pp87~92 , 2016
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Highly anisotropic etching of Ta thin films using high density plasmas of halogen based gases , VACUUM , Vol.133 , pp18~24 , 2016
