Won-jun Lee
Professor
Dept. of Advanced Materials Engineering
Sejong University
Korea
Biography
PhD Materials science and engineering, KAIST M.S. Materials science and engineering, KAIST B.S. Materials science and engineering, KAIST
Research Interest
- Thin film materials, equipment, and process technology for semiconductor integrated circuit applications - Through-siliocn vias for 3-dimensional semiconductor devices - Thin film batteries
Publications
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Jae-Kyung Kim, Kwangsun Jin, Jongwan Jung, Sa-Kyun Rha, and Won-Jun Lee, “Atomic Layer Deposition of SiO2 Thin Films Using Tetrakis(ethylamino)silane and Ozoneâ€, Journal of Nanoscience and Nanotechnology, 12 (2012) 3589.
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Kwang-Min Park, Jae-Kyung Kim, Byeol Han, Won-Jun Lee, Jinsik Kim,Hyun- Koock Shin, “Influence of the deposition temperature on the properties of copper thin films prepared by alternating injection of Cu(ethylketoiminate)2 and H2 on a ruthenium substrateâ€, Microelectronic Engineering, 89 (2012) 27.
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Byeol Han, Kyu Ha Choi, Kwangmin Park, Won Seok Han, and Won-Jun Lee, “Low-Temperature Atomic Layer Deposition of Cobalt Oxide Thin Films Using Dicobalt Hexacarbonyl tert-Butylacetylene and Ozoneâ€, Electrochemical and Solid-State Letters, 15 (2012) D14.
