Dr. Reinoud Wolffenbuttel
Associate Professor
Department of Microelectronics
Delft University of Technology
Netherlands
Biography
Reinoud F. Wolffenbuttel received a M.Sc. degree in 1984 and a Ph.D. degree in 1988, both from the Delft University of Technology. His thesis dealt with the application of silicon to color sensing. Between 1986 and 1993 he has been an assistant professor and since 1993 he has been an associate professor at the Department of Microelectronics, Faculty of Information Technology and Systems of the Delft University of Technology and is involved in instrumentation and measurement in general and on-chip functional integration of microelectronic circuits and silicon sensor, fabrication compatibility issues and micromachining in silicon and microsystems in particular. He published over 450 papers at international conferences and peer-reviewed journals on these subjects. He was a visitor at the University of Michigan, Ann Arbor, USA in 1992, 1999 and 2001, Tohoku University, Sendai, Japan in 1995 and EPFL Lausanne, Switzerland in 1997. He is the recipient of a 1997 NWO pioneer award. He served as general chairman of the Dutch national sensor conference in 1996, Eurosensors in 1999 and MicroMechanics Europe in 2003 and as chairman of the MME steering committee between 2003 and 2008. He is presently chairman of the IEEE BeNeLux Chapter on Instrumentation and Measurement.
Research Interest
Instrumentation and measurement
Publications
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Thermal annealing of thin PECVD silicon-oxide films for airgap-based optical filters
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A miniaturized optical gas-composition sensor with integrated sample chamber
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Micro thermal conductivity detector with flow compensation using a dual MEMS device