Tsan-yao Chen
ProfessorÂ
Department Engineering and System Science
National Tsing Hua University
Taiwan
Biography
Dr. Tsan-Yao Chen is affiliated to Engineering and System Science, National Tsing Hua University, where Dr. Tsan-Yao Chen is currently working as Professor . Dr. Tsan-Yao Chen has authored and co-authored several national and international publications and also working as a reviewer for reputed professional journals. Dr. Tsan-Yao Chen is having an active association with different societies and academies around the world. Dr. Tsan-Yao Chen made his mark in the scientific community with the contributions and widely recognition from honourable subject experts around the world. Dr. Tsan-Yao Chen has received several awards for the contributions to the scientific community. Dr. Tsan-Yao Chen major research interest involves Nanoscaled Physiochemistry, Surface Science, SR spectroscopy and scattering on nanomaterials characterization, X-ray Absorption Spectroscopy, nanoparticles in energy applications, Cl2 based cyclic etch and deposition technique on epitaxy growth, defect engineering and characterization in hot implantation Ultra-Shallow Junction (USJ) thin film.
Research Interest
Nanoscaled Physiochemistry, Surface Science, SR spectroscopy and scattering on nanomaterials characterization, X-ray Absorption Spectroscopy, nanoparticles in energy applications, Cl2 based cyclic etch and deposition technique on epitaxy growth, defect engineering and characterization in hot implantation Ultra-Shallow Junction (USJ) thin film