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Mark Kushner

Professor
Electrical Engineering and Computer Science, Chemical Engine
University of Michigan
United States of America

Biography

  Education: California Institute of Technology PhD Applied Physics ’79 MS Applied Physics, ’77 University of California at Los Angeles BS Nuclear Engineering (Summa Cum Laude) ’76 BA Astronomy (Summa Cum Laude) ’76 Professional Service: University of Michigan Ann Arbor, Michigan 2008-present George I Haddad Collegiate Professor, Electrical Engineering & Computer Science Dept. Professor, Nuclear Engineering and Radiological Sciences Dept. Professor, Applied Physics Program Professor, Chemical Engineering Director, Michigan Institute for Plasma Science and Engineering Director, DOE Center on Control of Plasma Kinetics Iowa State University: Ames, Iowa 2005-2008 Dean, College of Engineering Melsa Professor of Engineering, Department of Electrical and Computer Engineering University of Illinois at Urbana-Champaign: 2005-present Adjunct Faculty, Department of Electrical and Computer Engineering 1999-2004 Founder Professor of Engineering 1991-2004 Professor, Department of Electrical and Computer Engineering 2002-2004 Interim Head of Chemical and Biomolecular Engineering 2001 Interim Head of Electrical and Computer Engineering 2000 Interim Associate Dean of Administrative Affairs, College of Engineering 1994-1995 Assistant Dean of Academic Programs, College of Engineering 1988-1991 Associate Professor, Electrical and Computer Engineering 1986-1988 Assistant Professor, Electrical and Computer Engineering

Research Interest

Research Interests: Low Temperature Plasmas, Laser Physics and Spectroscopy, Plasma Chemistry, Plasma and Photochemical Materials Processing, Amorphous Thin Films, Pulse Power Plasmas, Environmental and Medical Applications of Plasmas Research Areas: Applied electromagnetics, MEMS and microsystems, optics and photonics, quantum science and engineering, integrated circuit design and VLSI, plasma science and engineering, energy and power.

Publications

  • A. H. Markosyan, S. R. Green, S. Deng, Y. B. Gianchandani and M. J. Kushner, "Miniaturized Magnet-less RF Electron Trap. I. Modeling and Analysis", J. Vac. Sci. Technol. B 35, 042001 (2017).

  • S. Deng, S. R. Green, A. H. Markosyan, M. J. Kushner and Y. B. Gianchandani, "Miniaturized Magnet-less RF Electron Trap. II. Experimental Verification", J. Vac. Sci. Technol. B 35, 042002 (2017).

  • I. Adamovich, S. D. Baalrud, A. Bogaerts, P. J. Bruggeman, M. Cappelli, V. Colombo, U. Czarnetzki, U. Ebert, J. G. Eden, P. Favia, D. B. Graves, S. Hamaguchi, G. Hieftje, M. Hori, I. D. Kaganovich, U. Kortshagen, M. J. Kushner, N J Mason18 , S. Mazouffre, S. Mededovic Thagard, H.-R. Metelmann, A. Mizuno, E. Moreau, A. B. Murphy, B. A. Niemira, G. S. Oehrlein, Z. Lj. Petrovic, L. C. Pitchford, Y.-K. Pu, S. Rauf, O. Sakai, S. Samukawa, S. Starikovskaia, J. Tennyson, K. Terashima, M. M. Turner, M. C. M. van de Sanden, A. Vardelle, "Topical Review: The 2017 Plasma Roadmap: Low Temperature Plasma Science and Technology", J. Phys. D: Appl. Phys. 50, 323001 (2017).

  • S. J. Lanham and M. J. Kushner, "Effects of a Chirped Bias Voltage on Ion Energy Distributions in Inductively Coupled Plasma Reactors", J. Appl. Phys. 122, 083301 (2017). [Featured as cover image for 28 August 2017 issue of Journal of Applied Physics.]

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