Mark Kushner
Professor
Electrical Engineering and Computer Science
University of Michigan
United States of America
Biography
California Institute of Technology PhD Applied Physics ’79 MS Applied Physics, ’77 University of California at Los Angeles BS Nuclear Engineering (Summa Cum Laude) ’76 BA Astronomy (Summa Cum Laude) ’76
Research Interest
Low Temperature Plasmas, Laser Physics and Spectroscopy, Plasma Chemistry, Plasma and Photochemical Materials Processing, Amorphous Thin Films, Pulse Power Plasmas, Environmental and Medical Applications of Plasmas
Publications
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J. R. Hamilton, J. Tennyson, S. Huang and M. J. Kushner, "Calculated Cross Sections for Electron Collisions with NF3, NF2 and NF with Applications to Remote Plasma Sources", Plasma Sources Sci. Technol. 26, 065010 (2017).
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A. H. Markosyan, S. R. Green, S. Deng, Y. B. Gianchandani and M. J. Kushner, "Miniaturized Magnet-less RF Electron Trap. I. Modeling and Analysis", J. Vac. Sci. Technol. B 35, 042001 (2017).
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S. Deng, S. R. Green, A. H. Markosyan, M. J. Kushner and Y. B. Gianchandani, "Miniaturized Magnet-less RF Electron Trap. II. Experimental Verification", J. Vac. Sci. Technol. B 35, 042002 (2017).
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I. Adamovich, S. D. Baalrud, A. Bogaerts, P. J. Bruggeman, M. Cappelli, V. Colombo, U. Czarnetzki, U. Ebert, J. G. Eden, P. Favia, D. B. Graves, S. Hamaguchi, G. Hieftje, M. Hori, I. D. Kaganovich, U. Kortshagen, M. J. Kushner, N J Mason18 , S. Mazouffre, S. Mededovic Thagard, H.-R. Metelmann, A. Mizuno, E. Moreau, A. B. Murphy, B. A. Niemira, G. S. Oehrlein, Z. Lj. Petrovic, L. C. Pitchford, Y.-K. Pu, S. Rauf, O. Sakai, S. Samukawa, S. Starikovskaia, J. Tennyson, K. Terashima, M. M. Turner, M. C. M. van de Sanden, A. Vardelle, "Topical Review: The 2017 Plasma Roadmap: Low Temperature Plasma Science and Technology", J. Phys. D: Appl. Phys. 50, 323001 (2017).
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S. J. Lanham and M. J. Kushner, "Effects of a Chirped Bias Voltage on Ion Energy Distributions in Inductively Coupled Plasma Reactors", J. Appl. Phys. 122, 083301 (2017).
